This case study presents how PHILOS Megaflux-CUF ultrafiltration enabled the reuse of 2,000 m³/day of semiconductor wafer wastewater. By removing fine CMP particles, metals, and variable chemistries, the UF system stabilized RO/EDI performance, reduced ultrapure water consumption, and improved overall sustainability in a water-stressed manufacturing region. Optimized UF design minimized footprint while enabling wafer recovery and economic savings, demonstrating Megaflux-CUF’s